Preparation of metal oxide nanoparticles by gas aggregation cluster source

• Al/AlxOy and Ti/TiOx nanoparticles (NPs) were produced by gas aggregation source.
• Dependence of the deposition rate on O2 fraction in the gas mixture was found.
• Optimal Ar/O2 working gas mixtures for production of nanoparticles were identified.
• O atoms were detected by OES even in the afterglow at a long distance from the target.
• Higher amount of O2 in the working gas mixture led to production of metal oxide NPs.

Al/AlxOy and Ti/TiOx nanoparticles have been fabricated using gas aggregation cluster source (GAS) equipped with 3-inch planar magnetrons. The main attention has been devoted to the evaluation of the role of oxygen admixture on the deposition rate and properties of formed nanoparticles. It has been found that oxidized nanoparticles are deposited when oxygen is present in the working gas mixture. Highest deposition rates for production of Al/AlxOy or Ti/TiOx nanoparticles were observed when 3% or 1.5% oxygen was present in the working gas mixture, respectively. Mean diameters of about 16 nm for the AlxOy nanoparticles and 30 nm for TiOx have been found under these deposition conditions.