کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1689655 1518939 2016 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of Si content on the microstructure and mechanical properties of VSiN films deposited by reactive magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Influence of Si content on the microstructure and mechanical properties of VSiN films deposited by reactive magnetron sputtering
چکیده انگلیسی


• By using XRD, HRTEM and XPS, the microstructure of the VSiN films was studied in details.
• The microhardness and stress of VSiN films were investigated in details.
• A new simple four-stage model was proposed.

A series of VSiN composite films with different Si content were deposited at room temperature by reactive magnetron sputtering. XPS, XRD, SEM, SAED, HRTEM, 3D Profilometer and Nano-indentation were employed to characterize the composition, microstructure, cross-sectional morphology and mechanical properties of the films. The results reveal that the c-VN phase and t-V5N phase coexist in films with different Si content and the c-VN is the major phase. The substitutional solid solution of (V,Si)N is formed when the Si content is less than 1.3 at.%. With a further increase of Si content, excess Si are aggregated in the grain boundary and amorphous Si3N4 is formed. It was found that minute traces of Si atoms can promote the growth of grain. A two-dimensional model was built in this study to reveal the existing forms of Si element and its influence on the microstructure and mechanical properties of VSiN films at different stages of the modelling process.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 131, September 2016, Pages 51–57
نویسندگان
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