High temperature oxidation of Cr–N coatings prepared by high power pulsed magnetron sputtering – Plasma immersion ion implantation & deposition

• A very dense Cr–N coating was prepared by the novel HPPMS-PIII&D.
• High thermal oxidation and corrosion resistance are observed up to 800 °C.
• The excellent properties are due to the dense structure and phase transition.

Good oxidation and corrosion resistance are required for cutting tools and other industrial components used in high temperature applications. The highest operational temperature of CrN is normally about 500 °C. A denser Cr–N coating prepared by high power pulsed magnetron sputtering – plasma immersion ion implantation & deposition shows oxidation resistance up to 800 °C compare with those prepared by conventional magnetron sputtering. The hardness and corrosion resistance are shown and discussed. The enhanced performance can be attributed to a phase transition from CrN to Cr2N during annealing and there is no obvious oxide formation on the coatings.