Composite SiOx/hydrocarbon plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyethylene or polypropylene

Composite SiOx  /hydrocarbon plasma polymer films have been prepared by RF sputtering of silica and hydrocarbon polymer (polyethylene (PE) or polypropylene (PP)) targets placed on two balanced magnetrons. The morphology and composition of the composite films have been analysed by means of AFM, RBS/ERDA, FTIR, and XPS. The obtained films demonstrated wide range of wettability and hardness in dependence on the preparation conditions. When the ratio of RF powers delivered to the individual targets PSiO2/PPE(PPP)PSiO2/PPE(PPP) changed from 0.1 to 10 the static contact angles of water varied from 75° to 25° and from 80° to 33° for composite films obtained from PE and PP, respectively. The hardness of the composite films varied from 2400 to 3400 N/mm2 and from 1600 to 2000 N/mm2 for the above-mentioned cases, respectively. Peculiar properties of the composite SiOx/hydrocarbon plasma polymer films have been discussed with respect to the elemental composition and nature of the chemical bonds established on the surface of the films.