کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1690097 1011250 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Microstructure and mechanical properties of multi-constituent superlattice coatings
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Microstructure and mechanical properties of multi-constituent superlattice coatings
چکیده انگلیسی
Superlattice nitride coatings with four different layer constituents, i.e., ZrN, MoN, NbN and AlN, were synthesized using an unbalanced closed-field magnetron sputtering coater. At small superlattice modulation periods, both MoN and AlN layers adapted to the cubic B1 structure due to a template effect, and the coatings exhibited a strong (2 0 0) preferred orientation. Increasing the modulation period above a critical value led to the formation of hexagonal MoN and AlN layers with diminishing (2 0 0) preferred orientation. These microstructure changes were reflected in the coating mechanical properties. Relatively high hardness and Young's modulus values were obtained at small modulation periods, which decreased dramatically above the critical modulation period. The effects of substrate bias on the layer crystallographic structure, coating preferred orientation and mechanical properties were similar to those of the modulation period.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 81, Issue 1, 16 September 2006, Pages 101-105
نویسندگان
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