کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1690098 1011250 2006 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Offset scatter reduction of spinning rotor gauges by vibration isolation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Offset scatter reduction of spinning rotor gauges by vibration isolation
چکیده انگلیسی
The spinning rotor gauge is an accurate vacuum gauge of good long-term stability. Many efforts have been aimed at the reduction of the uncertainties of this device. Here we examine the possibility of reducing the uncertainty in the low-pressure range caused by the scatter of the pressure-independent residual drag (offset). Random vibrations exposed to the system produce random eddy currents and lead to an additional scatter of the offset value. We tested different configurations, where the suspension head only was isolated from vibration or where both suspension head and stainless steel thimble were isolated. Data sets containing time, frequency of the rotor, relative deceleration rate and temperature were taken at residual pressure conditions. It was found that vibration isolation of the suspension head alone does not cause a significant reduction of the offset scatter, while vibration isolation of suspension head and thimble reduces the scatter by a factor of down to 130. Surprisingly, it was found that the size of the reduction depends on the controller suspension head unit used for the measurement.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 81, Issue 1, 16 September 2006, Pages 106-113
نویسندگان
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