کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1690152 1011251 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
The ion density distribution in a magnetized plasma sheath
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
The ion density distribution in a magnetized plasma sheath
چکیده انگلیسی

The ion density distribution of plasma sheath in an oblique magnetic field is investigated with a fluid model. We performed numerical simulations of the sheath. The results reveal that the magnetic field has significant effects on the plasma sheath, including ion density distribution and space charge density distribution. Two cases of ion incidence are considered here. Under suitable conditions, Lorentz force induces fluctuations in the ion density. And the magnetic field parallel to the board is responsible for these changes. The action states of ions are more complicated while the ions enter the sheath with an oblique incidence angle. Ions could gather in some regions, so that it leads to small peaks of the density curve. Also the space charge density in such regions is slightly higher.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 83, Issue 1, 4 September 2008, Pages 205–208
نویسندگان
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