Development of a turbo-molecular pump with a magnetic shield function

► We develop a TMP with a magnetic shield function. ► The housing material is a ferromagnetic substrate, SUS430. ► The field inside of the TMP is reduced to less than 0.3 mT in the perpendicular magnetic field of 9 mT. ► From simple estimation, the developed TMP will probably work well in a magnetic field of up to 20 mT.