Oxide-state evaluation of the zinc and aluminium in metallic thin films using Auger-electron-spectroscopy depth profiles

► Oxide and metallic state of Zn and Al in AES depth profiles of Al-Zn alloys were distinguished. ► Data from AES depth profilings previously performed on 2 different types of Zn-Al alloys were used. ► 2 different approaches were tested on both types of samples, results being reasonably consistent.