Characterization of DLC films prepared by plasma-based ion implantation on AISI 321 steel

DLC films were prepared by plasma-based ion implantation (PBII) using acetylene as carbon source on AISI 321 steel substrate. The effect of implanting voltage on the characteristics of these films was investigated. The structures of the films were analyzed by Raman spectroscopy. The morphologies of the films were observed by atomic force microcopy (AFM), and the hardness of the films was measured with mechanical property microprobe. The results indicated that the characteristics of these films are strongly depended on the implanting voltage. The DLC films with lowest friction coefficient, longest wear life, and lowest surface roughness was achieved around −30 keV, which was thought to be the optimum implanting voltage in this study.