Thick CrN/TiN multilayers deposited by arc ion plating

The thick multilayers, composed of one, two and three CrN/TiN bilayers, as well as CrN and TiN monolayers, were fabricated on well-polished high-speed-steel by arc ion plating, respectively. The microstructure and mechanical properties of the multilayers have been measured and analyzed using traditional methods. According to the SEM morphology, the number of the macro-particles on CrN is larger than TiN surface, showing that the CrN film has coarser surfaces. The periodic structure of the multilayers can be clearly seen by cross-sectional SEM. The smooth, regular and sharp interfaces indicate that the sublayer combines both with each other and with the substrate tightly. It is found that the mechanical properties of these thick multilayers, which have thickness of several to more than 10 μm, have been improved when compared with CrN or TiN single layer. It is considered that the interfaces and the alternating soft/hard substructure of CrN/TiN bilayer contribute to the enhanced mechanical properties.