کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1690463 1011260 2007 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Multidimensional fluid–particle modelling technique in low-temperature argon plasma at low pressure
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Multidimensional fluid–particle modelling technique in low-temperature argon plasma at low pressure
چکیده انگلیسی

In the contribution there is presented a new computer modelling technique, which can be used in multidimensional computer simulations of plasma at low pressure. The technique is based on the fluid–particle approach and can be used in the study of the range of physical phenomena, e.g. plasma behaviour in the vicinity of substrates, probe diagnostics, plasma technology, etc. The computer model is useable for the solution of three-dimensional problems and it minimizes the restrictions arising in complicated model geometry. The algorithm has been tested during the study of plasma sheath formation in the vicinity of probes with various geometries immersed into low-temperature argon plasma. Some results of these simulations are presented in the last section.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 82, Issue 2, 29 October 2007, Pages 220–223
نویسندگان
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