کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1690687 1011271 2006 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Plasma polymer films from sputtered polyimide
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Plasma polymer films from sputtered polyimide
چکیده انگلیسی

Deposition of plasma polymer films by r.f. magnetron sputtering of polyimide in an atmosphere of argon, nitrogen and in a self-sputtering mode is studied. In situ analytical techniques are applied to monitor the composition of both plasma and growing film during the deposition. A co-evaporation regime is observed at higher applied powers. Such a regime is characterized by a significant increase in deposition rate of plasma polymer films. In addition CO-based groups appear in the plasma volume and in the resulting films. The films deposited in a pulsed mode are similar in composition to those deposited in the continuous regime at equivalent power. The plasma polymer films are found to be stable to short-term oxidation in air.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 81, Issue 4, 6 November 2006, Pages 517–526
نویسندگان
, , , , , , ,