کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1690772 1011275 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Al–Mg–B thin films prepared by magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Al–Mg–B thin films prepared by magnetron sputtering
چکیده انگلیسی

Hard, nanocomposite aluminum magnesium boride thin films were prepared on Si (100) substrates with a three target magnetron sputtering system. The films were characterized by X-ray diffraction, atomic force microscope, electron micro-probe, Fourier transform infrared spectroscopy and nanoindentation. The results show that the maximum hardness of the as-deposited films is about 30.7 GPa and these films are all X-ray amorphous with smooth surfaces. The influences of substrate temperature and boron sputtering power on the quality of the films are discussed. From the results of this work, magnetron sputtering is a promising method to deposit Al–Mg–B thin films.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 85, Issue 4, 21 October 2010, Pages 541–545
نویسندگان
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