کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1690854 | 1011279 | 2010 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
ZnO thin films for VOC sensing applications
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: ZnO thin films for VOC sensing applications ZnO thin films for VOC sensing applications](/preview/png/1690854.png)
چکیده انگلیسی
ZnO thin films were prepared by reactive RF sputtering on thermally oxidized Si for gas sensing applications. Three VOC vapors were chosen to investigate the response behavior of the prepared ZnO. Acetone, isopropanol and ethanol were tested, and the sensitivity of the sensor toward acetone was the highest (S ∼ 100) for 500 ppm acetone at 400 °C. The largest sensitivity was achieved at 400 °C for all the above vapors. The sensor shows a stable, reversible and repeatable behavior in the acetone concentration ranging from 15 up to 1000 ppm. The mechanism of the sensing was explained according to the ionosorption model.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 85, Issue 1, 23 July 2010, Pages 101–106
Journal: Vacuum - Volume 85, Issue 1, 23 July 2010, Pages 101–106
نویسندگان
N.H. Al-Hardan, M.J. Abdullah, A. Abdul Aziz, H. Ahmad, L.Y. Low,