Atomic oxygen in remote plasma of radio-frequency hollow cathode discharge source: Characterization and efficiency

Low-pressure, low-temperature remote oxygen plasma ignited by a radio-frequency (RF) hollow cathode discharge (HCD-L300) system is shown to be a powerful and effective source of neutral atomic oxygen (AO), useful in processing of polymeric materials. The density of AO was determined by a catalytic nickel probe as a function of pressure, RF power, oxygen flow rate and axial distance in the processing chamber. It was found to vary between ∼1×1019 to ∼1×1020 atom m−3. The AO rich remote plasma-induced modification of wetting properties of polyimide (PI) and fluorinated ethylene propylene (FEP) surfaces has also been investigated. The wetting properties of the PI and FEP surfaces before and after exposure to the plasma were characterized by contact angle measurements and analysis. It was found that the influence of plasma surface treatment on wetting properties of FEP has an opposite effect to that of PI. On increasing the time of treatment, the surface of PI becomes more hydrophilic, whereas the hydrophobicity of FEP surface enhances. Moreover, a superhydrophobic FEP surface is produced at prolonged time of treatment. Changes in the surface morphology due to the plasma treatment were viewed under a scanning electron microscope (SEM).