Ion density increase in high power twin-cathode magnetron system

► In dual split HIPIMS system ion density can be increased when two pulses in sequence are applied to different magnetrons. ► Pulsing in pairs is much more effective than simultaneous pulsing (normal HIPIMS mode). ► Electron heating is more effective when Debye length is high enough at the beginning of each pulse. ► Dual split magnetron system allows the problem of gas rarefaction between the opposite targets to be overcome.