Experimental development and deposition of nanocomposite films by a hybrid dc magnetron sputtering and cluster gun technique

A novel hybrid experimental prototype involving dc magnetron sputtering combined with an ingenious nanocluster source has been developed to deposit nanocomposite coatings by incorporating pre-formed clusters into a sputtered coating under high vacuum conditions. An electromagnetic fuel injector was connected with the nanocluster chamber and then optimised along with the sputtering chamber in order to incorporate the clusters in the coating matrix. The injection flux was primarily controlled by: the argon pressure and the amount of nanoclusters, the duration and repetition time of the injection and distance between the nozzle of the injector and the substrates. Several experiments were carried out on various substrates such as carbon tape, Al, Si and M2 steel with different nanoparticles of WO3, SiC and WS2. The preliminary characterization, consisting in the phase analysis, SEM micrographs and elemental composition, allowed confirming the presence of the clusters attached to the carbon tape when a free plasma injection was performed. Furthermore, the co-existence of Ti and TiN matrixes containing the SiC, WO3 and WS2 nanoparticles was confirmed.