کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691031 1011291 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effect of surface alteration of hydride titanium washers on discharge characteristics of plasma gun
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Effect of surface alteration of hydride titanium washers on discharge characteristics of plasma gun
چکیده انگلیسی
Several titanium (Ti) hydride washers containing different amounts of both TiN and an oxide compound (Ox) are tested for the source of hydrogen (H+) plasmas. According to the different-looking surfaces of the washers of Ti hydride, considerable change in the required discharge voltage is observed. Slightly larger probe currents are also measured from plasmas produced with the washers having the smallest amounts of TiN and Ox, which suggests the existence of more H+ ions in the formed plasmas. Once apparent grain coarsening appears on the surface of Ti hydride washers at the temperature around 950°C, no successful electric discharge occurred.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 84, Issue 5, 10 December 2009, Pages 564-567
نویسندگان
, , , ,