کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691148 1011297 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Operating characteristics of the hollow anode glow discharge ion source
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Operating characteristics of the hollow anode glow discharge ion source
چکیده انگلیسی

In this work, a new shape of a glow discharge ion source with axial extraction has been designed and constructed. High output ion beam current can be extracted axially in a direction normal to the discharge region without using extraction system. Optimization of the distance between the anode and the cathode has been determined using argon gas. It is found that the optimum gap distance between the anode and the cathode is equal to 3.5 mm, where stable discharge current and maximum output ion beam current can be obtained. The discharge characteristics of the ion source at different operating gas pressures have been measured at this optimum distance between the anode and the cathode. A disk of Teflon insulator has been put between the anode and the cathode. This disk was covering the cathode area and reducing the discharge area on the cathode surface for discharge confinement, therefore, a higher output ion beam current could be obtained.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 84, Issue 3, 5 November 2009, Pages 405–409
نویسندگان
, , , ,