Simulation to improve the magnetic field in the straight section of the rectangular planar DC magnetron

For the rectangular planar DC magnetron, Gaussian type erosion profile may occur in the straight section of target and lead to lower target utilization. Considering the influence of magnetic field on the trajectories of energetic electrons, the target erosion profile and deepest eroded position are analyzed, and then the approaches of magnetic field improvement are proposed. Based on this, two magnet structures with AlNiCo and SmCo are discussed, which could be improved by fitting a shunt bar. According to 2D non-self-consistent particle simulation and Yamamura/Tawara formula, the target erosion profile could be predicted. Via the simulation, the approaches of magnetic field improvement are verified. In the same order of magnetic field intensity, the horizontal component of the magnetic field with wider distribution and larger concavity is proved to make the target utilization much increased.