کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1691394 | 1011314 | 2008 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Are dominant sputtering products from metal targets really monatomic?
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
We observed four experimental results which suggest the existence of unidentified species other than metal atoms and metal ions in magnetron sputtering discharges employing metal targets. The most probable species which are compatible with the experimental observations are clusters (mainly dimers and trimers) of metal atoms. According to the experimental results, it is speculated that the amount of clusters is comparable to that of metal atoms. In other words, the present experimental results suggest a possibility that dimers and trimers are major sputtering products from metal targets.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 83, Issue 3, 15 October 2008, Pages 463–466
Journal: Vacuum - Volume 83, Issue 3, 15 October 2008, Pages 463–466
نویسندگان
K. Sasaki, N. Nafarizal, J.-S. Gao, K. Shibagaki,