Wide erosion nickel magnetron sputtering using an eccentrically rotating center magnet

A wide erosion magnetron sputtering system for nickel targets has been developed using a large, tall and eccentrically rotating center magnet. In this system, a water cooling unit was attached behind the target except the moving center magnet area. Therefore, the rotating mechanism of yoke magnet could be separated from the cooling water without decreasing the magnetic flux on the target surface and ensure a high reliability of long life use.Utilization on the 5-inches Ni target was 40%, as compared with 12% utilization of the conventional system. The sputtering rate and erosion depth linearly changed while the target was in use, because the increase of magnetic flux was lower than that of a conventional system. Hence, the target life will be precisely managed by the total sputtering time.