کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1691417 | 1011314 | 2008 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
In2O3-ZnO transparent conductive oxide film deposition on polycarbonate substrates
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: In2O3-ZnO transparent conductive oxide film deposition on polycarbonate substrates In2O3-ZnO transparent conductive oxide film deposition on polycarbonate substrates](/preview/png/1691417.png)
چکیده انگلیسی
Amorphous transparent conductive oxide films in the In-Zn-O system were deposited on polycarbonate (PC) substrates by simultaneous DC sputtering of an In2O3 target and a ZnO target with either 4Â wt% Al2O3 or 7.5Â wt% Ga2O3 impurities. Although the resistivity of the amorphous, non-doped In-Zn-O film on PC was about one order of magnitude higher than that on the glass substrate, the resistivity of the In-Zn-O films with Ga2O3 impurities on PC substrates was reduced to the level of the non-doped In-Zn-O films on glass substrates. The addition of Al2O3 or Ga2O3 to the In-Zn-O films also induced the widening of the optical band gap, which would improve transparency at blue wavelengths.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 83, Issue 3, 15 October 2008, Pages 557-560
Journal: Vacuum - Volume 83, Issue 3, 15 October 2008, Pages 557-560
نویسندگان
Toshihiro Moriga, Koji Shimomura, Daisuke Takada, Hiroshi Suketa, Keisuke Takita, Kei-ichiro Murai, Kikuo Tominaga,