کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1691454 | 1011314 | 2008 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Cylindrical film deposition system for three-dimensional titanium–nickel shape memory alloy microstructure Cylindrical film deposition system for three-dimensional titanium–nickel shape memory alloy microstructure](/preview/png/1691454.png)
We have designed and developed a sputtering deposition apparatus to fabricate a cylindrical spring-like microstructure for a titanium–nickel (Ti–Ni) shape memory alloy (SMA) film-actuated micro-catheter. The developed apparatus that mainly consists of gearboxes to transform rotation of a stage into rotation of a shaft specimen is mounted on a ternary-source sputtering system. By using this system, a Ti–Ni SMA film with the controlled composition has been successfully deposited around a copper (Cu) shaft surface and the annealed film has possessed the shape memory characteristics evaluated by X-ray diffraction (XRD). A spring shape of the film has been capably patterned by photolithography and wet etching, so the developed deposition apparatus with a specimen rotation unit would be useful for fabricating a three-dimensional (3D) microstructure towards the active micro-catheter.
Journal: Vacuum - Volume 83, Issue 3, 15 October 2008, Pages 703–707