کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691467 1011315 2007 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Concept of a new turbomolecular pump with central opening for free axial access—The Ring turbomolecular pump
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Concept of a new turbomolecular pump with central opening for free axial access—The Ring turbomolecular pump
چکیده انگلیسی

For conventional (single-flow) turbomolecular pumps (TPs) the central disc area of the inlet side of the compressor turbine is blind for pumping and may be utilized otherwise. The design feature of the new Ring TP displays a central opening of the TP all along the axis, where care is taken to prevent coupling between the vacuum areas on both sides of the compressor turbine. The axial opening can be used independently, e.g. for free central access to the high vacuum side through the TP.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 82, Issue 4, 12 December 2007, Pages 408–411
نویسندگان
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