کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691485 1518983 2007 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nano to micrometric HFCVD diamond adhesion strength to Si3N4
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Nano to micrometric HFCVD diamond adhesion strength to Si3N4
چکیده انگلیسی

In the present study, hot filament chemical vapour deposition technique was used to grow diamond films from nanometric to microcrystalline grain sizes. Their adhesion levels to a silicon nitride ceramic were compared after Brale tip indentation testing. The best behaviour was attained by the microcrystalline diamond (MCD) grade due to its higher crystallinity and superior hardness. In contrast, nanocrystalline diamond (NCD) coatings showed the less effective chemical bonding to the ceramic substrate due to the higher degree of sp2 content. The MCD coating supported a normal load of 1600 N without spalling-off and presented an interfacial crack resistance of 12.0 N μm−1, much better than that reported until the present. This behaviour may be attributed to the CF4 plasma pre-treatment of the substrate.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 81, Issues 11–12, 28 August 2007, Pages 1443–1447
نویسندگان
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