Annealing effects on the structural properties of IrO2 thin films

We have demonstrated the structural and morphological changes of iridium oxide (IrO2) films by the thermal annealing process. We have characterized the samples by using the X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dispersive X-ray spectroscopy (EDX). The Ir-related XRD peaks predominantly appeared after the thermal annealing at 750-1000 °C. SEM images revealed that the films became quite uneven in thickness by annealing at 750 °C, whereas island-like structures were found to agglomerate on substrate surfaces by annealing at 1000 °C. From EDX and XRD analysis, we suggested that the agglomerated structures mainly consisted of Ir phase.