کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691749 1011330 2006 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Improvement in thermal stability of B-C-N thin films fabricated by magnetron sputtering using graphite and BN co-target
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Improvement in thermal stability of B-C-N thin films fabricated by magnetron sputtering using graphite and BN co-target
چکیده انگلیسی
Thermal stability of amorphous boron-carbon-nitride (B-C-N) films fabricated by magnetron sputtering using a graphite and BN co-target was studied by X-ray photoelectron spectroscopy, infrared absorption spectroscopy, Raman spectroscopy and scanning electron microscopy. The boron-rich B-C-N films showed the higher thermal stability. These results suggest that an incorporation of B atoms into the amorphous CN networks improves the thermal stability. This improvement can be explained in terms of the creation of boron-nitrogen bonds and/or boron-carbon bonds.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 80, Issue 7, 31 May 2006, Pages 748-751
نویسندگان
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