کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691863 1011348 2006 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Studies on sputtering process of multicomponent Zr-Ti-Cu-Ni-Be alloy thin films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Studies on sputtering process of multicomponent Zr-Ti-Cu-Ni-Be alloy thin films
چکیده انگلیسی
Sputter deposition process of a multicomponent Zr-Ti-Cu-Ni-Be metallic alloy has been studied experimentally and by numerical simulations. Monte-Carlo simulations were performed using a model based on thermalization and diffusion of sputtered atoms. Incident energy and angle of sputtered atoms on substrate were obtained from simulations. The incident angular distribution was observed to be a normal distribution at all sputtering pressures. Average incident kinetic energy of the condensing atoms on the substrate was observed to be 0.2-0.3 eV indicating most of them are thermalized. Simulations were extended to predict compositional variations in films prepared at various process conditions. These results were compared with composition of films determined experimentally using Rutherford Backscattering Spectrometry (RBS). Contents of Zr, Ti, Cu and Ni quantified using RBS were in moderate agreement with the simulated composition. Be could not be quantified accurately by RBS largely due to very low energy peak of Be in the spectrum. These studies are shown to be useful in understanding the complexities in multicomponent sputtering.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 80, Issue 5, 26 January 2006, Pages 406-414
نویسندگان
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