Comparison of different strategies to realize highly reflective thin film coatings at 1064 nm

This paper addresses approaches to achieve highly reflective thin film coatings at 1064 nm in the near infrared (NIR) spectral region. Different strategies, i.e. metal mirrors, homogeneous dielectric multilayer and hybrid multilayer (metal layer with multilayer enhancement) are suggested. These coatings are deposited with different techniques, and their optical and mechanical performances are analyzed and concluded. Compared to all-dielectric multilayer, metal-enhanced coatings show lower thickness and lower stress load, and therefore are very promising in substrate-sensitive applications.