Improvement of solar cell efficiency by applying Si3N4 nanopattern on glass substrate

• Si3N4 nanopattern and planarized Si3N4 nanopattern were fabricated on glass.
• The Si3N4 and planarized Si3N4 nanopattern had similar optical properties.
• Morphology of the active layer was changed by the Si3N4 nanopattern.
• Absorption of solar cell was increased due to the Si3N4 nanopattern.
• Efficiency of the solar cell with the Si3N4 nanopattern substrate increased by 24.2%.

A cylindrical Si3N4 nanopattern whose heights was 200 nm was fabricated on a glass substrate, and an aluminum-doped zinc oxide (AZO) layer was grown on the nanopatterned glass substrate. The nanopattern was applied to an amorphous silicon solar cell in order to increase the light-scattering effect, thus enhancing the efficiency of the solar cell. The reflectance of the solar cell on the Si3N4 nanopattern decreased and its absorption increased. Compared to a flat substrate, the short-circuit current density (Jsc) and conversion efficiency of a solar cell on the Si3N4 nanopatterned substrate were improved by 17.9% and 24.2%, respectively, as determined from solar simulator measurements.