Energy harvester using PZT nanotubes fabricated by template-assisted method

Lead zirconate titanate (PZT) nanotubes fabricated by template-assisted method using sol–gel solution infiltration are applied for energy harvester. To fabricate PZT nanotubes, an anodic aluminum oxide is used for the template, and as-prepared PZT solution dropped on the surface of the AAO is infiltrated by vacuum pump into the pores in the AAO. The template including PZT solution is dried at 80 °C for 1 min and dried again at 300 °C for 10 min, and then it treated at 650 °C for 30 min to anneal PZT and form the expected perovskite phase. The fabricated nanotubes were mixed with PDMS polymer composite and polyimide films coated Pt/Ti were used for electrodes. Finally, it demonstrated that the energy harvester could generate the output power of 37 nW/cm2.