کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1787012 1023429 2012 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Design study of hard X-ray tomography system to obtain a spatial resolution of 100 nm
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Design study of hard X-ray tomography system to obtain a spatial resolution of 100 nm
چکیده انگلیسی

An optic-based X-ray tomography system of a high spatial resolution using a conventional X-ray tube was proposed. The system had several X-ray optics: multilayer mirror for monochromatic X-ray, capillary optic for focusing X-ray onto a sample, and objective zone plate. The X-ray tomography system was designed for obtaining a spatial resolution of 100 nm. Design parameters for each optic were determined and optimized by ray tracing in considering X-ray intensity and reflectivity. The X-ray tomography system with a spatial resolution of 100 nm will provide a good inspect tool in bio-medical field and semiconductor applications.


► The design of X-ray tomography system which can obtain a spatial resolution of 100 nm by X-ray optics is presented.
► The X-ray tomography system is designed for using a conventional X-ray tube.
► Design parameters for several X-ray optics are determined by ray tracing.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 12, Issue 1, January 2012, Pages 134–140
نویسندگان
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