کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1787012 | 1023429 | 2012 | 7 صفحه PDF | دانلود رایگان |

An optic-based X-ray tomography system of a high spatial resolution using a conventional X-ray tube was proposed. The system had several X-ray optics: multilayer mirror for monochromatic X-ray, capillary optic for focusing X-ray onto a sample, and objective zone plate. The X-ray tomography system was designed for obtaining a spatial resolution of 100 nm. Design parameters for each optic were determined and optimized by ray tracing in considering X-ray intensity and reflectivity. The X-ray tomography system with a spatial resolution of 100 nm will provide a good inspect tool in bio-medical field and semiconductor applications.
► The design of X-ray tomography system which can obtain a spatial resolution of 100 nm by X-ray optics is presented.
► The X-ray tomography system is designed for using a conventional X-ray tube.
► Design parameters for several X-ray optics are determined by ray tracing.
Journal: Current Applied Physics - Volume 12, Issue 1, January 2012, Pages 134–140