Photocatalytic TiO2 thin films deposited on flexible substrates by radio frequency (RF) reactive magnetron sputtering

► Taguchi's method was a feasibility tool to study the performance of the TiO2 deposition process. ► RF power has the greatest effect on MB photodecomposition. ► The RF power increases will result in an improvement of film crystalline structure. ► Increasing sputtering power contributed to increased crystallite size and higher surface roughness for the Ti thin films.