Dependence of electrical and mechanical durability on Zn content and heat treatment for co-sputtered ITZO films

In–Sn–Zn–O (ITZO) films were deposited on durable polymer substrates at room temperature by magnetron co-sputtering using two cathodes (DC, RF) and post-annealed at 200 °C. The influence of the Zn concentration on the structural, mechanical, electrical and optical properties was investigated. The mechanical durability was examined using bending test.The crystallinity of the ITZO films decreased with increasing Zn concentration, which led to a decrease in surface roughness. With increasing Zn concentration and post-annealing temperature, the mechanical durability of the films was improved remarkably, indicating small change in resistance with increasing cycle number. The resistivity of the ITZO films increased with increasing Zn concentration and the transmittance of all films was >80% in the visible light region.