Monte Carlo simulation of nitriding in iron by a mixing technology with laser and plasma beams

A program is modeled to describe nitriding depth by a new mixing laser and plasma beams nitriding (LPN) technique. The model extends the transport of ions in matter (TRIM) program by adding temperature and energy factors into the energy function. The nitriding depths and nitrogen distribution in substrate were calculated by Monte Carlo program. There is a good agreement between calculation and experiment results at different laser energy intensities, scanning velocities and nitrogen ion energies respectively. Moreover, the nitriding process diagrams by LPN technique are shown from calculation results.