کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1787356 | 1023439 | 2011 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Fabrication of nano-floating gate memories through atomic layer deposition incorporated with chemically-synthesized ZnO-nanocrystals Fabrication of nano-floating gate memories through atomic layer deposition incorporated with chemically-synthesized ZnO-nanocrystals](/preview/png/1787356.png)
Nano-floating gate memories made of Al2O3/ZnO/Al2O3 nanostructures were fabricated with chemically-driven ZnO nanocrystals embedded into high-k Al2O3 thin films prepared through atomic layer deposition. The memory characteristics were analyzed through high-frequency capacitance–voltage measurement and current–voltage characteristics, along with high-resolution images of the aforementioned structures. The dotted ZnO nanocrystals function as charge-trapping/detrapping centers, inducing a very large memory window of 5.34 V. The defective nature of ZnO was optimally adjusted into the energy-band diagrams in combination with the tunneling and control layers of the robust Al2O3 thin films. The measured memory characteristics exhibited superior retention features derived from the charge-trapping/detrapping behaviors.
► Nano-floating gate memories made of Al2O3/ZnO/Al2O3 nanostructures were fabricated.
► Chemically-driven ZnO nanocrystals were embedded in high-k Al2O3 thin films.
► The dotted ZnO nanocrystals induced a very large memory window of 5.34 V.
► The defective nature of ZnO functions as trapping/detrapping centers in NFGMs.
► The disconnected ZnO nanocrystals exhibit superior retention characteristics.
Journal: Current Applied Physics - Volume 11, Issue 6, November 2011, Pages 1354–1358