کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1787610 1023447 2011 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Study of the dust removal efficiency in capacitively coupled plasmas with annular electrodes
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Study of the dust removal efficiency in capacitively coupled plasmas with annular electrodes
چکیده انگلیسی

The behavior of dust particles in capacitively coupled plasmas with annular electrodes is investigated. With the application of modulated signals on the annular electrodes, the periodical potential wells can be produced and it can play an effective role on dust removing. We pay our attention to the relations between the dust removal efficiency and the modulated signals. It is presented that by increasing the applied voltage or the applied frequency on the annular electrodes, the dust removal efficiency increases significantly. It is also shown that with the increase of the dust diameter, the dust removal efficiency decreases.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 11, Issue 5, Supplement, September 2011, Pages S131–S134
نویسندگان
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