کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1788016 1023457 2006 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
TEM investigation of hydrogen-implanted and annealed single-crystal SrTiO3
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
TEM investigation of hydrogen-implanted and annealed single-crystal SrTiO3
چکیده انگلیسی

In this study, the structural properties of single-crystal SrTiO3 implanted with H+ have been investigated by transmission electron microcopy (TEM). The investigation was carried out on an as-implanted sample and samples after annealing at 500 °C and 700 °C for 2 h. It shows that the basic process of layer splitting involves the formation of microcracks and microcavities in the depth determined from the implanted energy similar to the process in the case of silicon. The as-implanted sample shows large out-of-plane strain also similar to the report in silicon. The microcavities are filled with amorphous material as the result of complicated interaction of the defects during the annealing.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 6, Issue 3, June 2006, Pages 583–586
نویسندگان
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