کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1788738 | 1023478 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of nanoimprinted curved feature for focusing grating coupler using hydrogen silsesquioxane mold
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication of nanoimprinted curved feature for focusing grating coupler using hydrogen silsesquioxane mold Fabrication of nanoimprinted curved feature for focusing grating coupler using hydrogen silsesquioxane mold](/preview/png/1788738.png)
چکیده انگلیسی
The nanoimprinted curved features for focusing grating coupler have been fabricated with hydrogen silsesquioxane mold. The minimum gap between the nanoimprinted curved features is 85 nm and the whole device size is 1 mm × 1 mm. The mold without anti-stiction coating did not cause the failure during separation process. The implemented optical device using nanoimprinted curved features have very small spot size and good output coupling efficient of 347 nm and 28.2%, respectively.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 6, Supplement 1, August 2006, Pages e121–e124
Journal: Current Applied Physics - Volume 6, Supplement 1, August 2006, Pages e121–e124
نویسندگان
Hojun Ryu, Dongwoo Suh, Mun Cheol Paek,