Finite element analysis of piezoelectric actuator with PMN–PT single crystals for nanopositioning

A piezoelectric bending actuator has been used widely in areas related to precision position controlling, loudspeakers, and pressure sensing. In this paper, a fine focusing actuator is designed using a computer aided design tools, Solid Works 2004, for an optical disk drive pick-up system. The finite element analyses are performed with the software COSMOS Work 2004 and the ANSYS 5.7. The tip displacement of the piezoelectric bending actuator with PMN-PT single crystals is 46 μm at 10 V. It is 15 times larger than tip displacement of PZT ceramics for the same design. The tip displacement obtained from the finite element analyses agrees with the measured data very well.