Different aggregation states in Cu/Co multilayers prepared by RF sputtering on rotating substrates

Co/Cu multilayers with different Co/Cu ratio were prepared by RF sputtering on Si3N4 substrates in Ar atmosphere by the rotating-substrate technique. The samples were produced with five subsequent expositions of the substrate, rotating at nine angular velocities between 0.23 and 0.63 rad/s. Room temperature measurements of magnetization and magnetoresistance point to a gradual transition from a multilayered to a granular structure on increasing the angular velocity of the substrate.