Multichannel HPD for high-speed single photon counting

We have developed a multichannel Hybrid Photo-Detector with fast time response, good timing resolution and low noise after a genuine signal (afterpulse). For this purpose, a prototype has been developed to encapsulate a newly designed multichannel avalanche diode with low capacitance, 3 pF. The channel number is 32 in one chip, arranged as 2 lines of 16 pixels each 0.8 mm×0.8 mm in size. The gain uniformity of one line (16 channels) is within 3%. The timing resolution is 114 ps FWHM, including a pulse width of 77 ps from the light source and a timing jitter of approximately 30 ps from the measurement system. An afterpulse with extremely low probability has been confirmed under the delay of 180 ns from the genuine signal, and it is a negligible value in most applications.