Evaluation of slim-edge, multi-guard, and punch-through-protection structures before and after proton irradiation

► We have evaluated radiation tolerance of n-in-p sensors up to 1×1016 1 MeV neq/cm2. ► Both n-bulk and p-bulk require a field width≥450 μm in order to withstand 1000 V. ► The MD onset voltage was found to be independent of the edge width. ► With increasing number of guard rings, bias voltage tolerance improved before irrad. ► BZ4D-5 (with full extension) performs the best among the samples.