کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1824922 | 1027347 | 2011 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication and characterization of ultra-high resolution multilayer-coated blazed gratings
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
ابزار دقیق
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Multilayer-coated blazed gratings with high groove density are the most promising candidates for ultra-high resolution soft X-ray spectroscopy. They combine the ability of blazed gratings to concentrate almost all diffraction energy in a desired high diffraction order with high reflectance soft X-ray multilayers. However in order to realize this potential, the grating fabrication process should provide a near perfect groove profile with an extremely smooth surface of the blazed facets. Here we report on the successful fabrication and testing of ultra-dense saw-tooth substrates with 5000 and 10,000 lines/mm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 649, Issue 1, 1 September 2011, Pages 156–159
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 649, Issue 1, 1 September 2011, Pages 156–159
نویسندگان
Dmitriy L. Voronov, Erik H. Anderson, Rossana Cambie, Scott Dhuey, Eric M. Gullikson, Farhad Salmassi, Tony Warwick, Valeriy V. Yashchuk, Howard A. Padmore,