کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1824966 | 1027349 | 2011 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
C3c measurement and dispersion reduction for beam-tilt optics of aberration-corrected SEM
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
ابزار دقیق
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: C3c measurement and dispersion reduction for beam-tilt optics of aberration-corrected SEM C3c measurement and dispersion reduction for beam-tilt optics of aberration-corrected SEM](/preview/png/1824966.png)
چکیده انگلیسی
To observe 3D structures of semiconductor devices, two beam-tilt observation methods for SEM were developed. The first is an aberration corrector with a tilted beam and the other is an aberration-measurement method for beam-tilt optics. The measured aberration coefficients show that the resolution of the tilted beam is restricted mainly by the dispersion of chromatic-spherical combination aberration. To reduce the dispersion of the tilted beam, a dispersion-suppression method was developed. Dispersion suppression improved the resolution of an SEM image to 2.7 nm at beam-tilt angle of 10° and landing energy of 800 eV.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 645, Issue 1, 21 July 2011, Pages 28–32
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 645, Issue 1, 21 July 2011, Pages 28–32
نویسندگان
Tomonori Nakano, Kotoko Hirose, Takeshi Kawasaki,