Diagnostics of the influence of levitating microparticles on the radiofrequency argon plasma

The effect of a levitating cloud of microparticles on the parameters of a radiofrequency (RF) plasma has been studied by means of two experimental techniques. Axial distributions of 1 s excited states of argon were measured by a self-absorption method. A correction of a standard self-absorption method for the extinction of the light by the levitating microparticles is proposed. In addition the electron temperature was estimated using the optical emission spectroscopy. Measurements at the same discharge conditions in a microparticle-free discharge and discharge, containing a cloud of levitating microparticles, revealed the non-local influence of the microparticle cloud on the discharge plasma. The most probable cause of this influence is the disturbance of the ionization balance by the levitating microparticles.