کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1826083 | 1526468 | 2010 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Image improvement with modified scanning waves and noise reduction in a scanning electron microscope
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
ابزار دقیق
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
In order to acquire a high-resolution image in a scanning electron microscope (SEM), a well-modulated current profile on the deflection coil must be generated by a scan waveform, and a properly selected scan waveform can eliminate the distortion of the image. In this work, various adjustments to the scan waveform, including the frequency, slope, and flatness, were analyzed. A new scan waveform using sinusoidally varying voltages was found to reduce distortion, particularly at the outer range image. The SEM image was also improved by reducing noise from the driver circuit and separating electrical grounding of the scanning coils.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 620, Issues 2–3, 11–21 August 2010, Pages 112–120
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 620, Issues 2–3, 11–21 August 2010, Pages 112–120
نویسندگان
Dong Hwan Kim, Seung Jae Kim, Se Kyu Oh,