کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1826639 1526472 2010 12 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم ابزار دقیق
پیش نمایش صفحه اول مقاله
Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler
چکیده انگلیسی

A new low-budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metrology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are also described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high-performance slope measuring instruments when measuring the same high-quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 616, Issues 2–3, 1 May 2010, Pages 212–223
نویسندگان
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